GSTMS series magnetron sputtering coating equipment is a single-piece sputtering coating machine. Multiple molecular pumps provide excellent vacuum conditions and stable sputtering conditions.

Equipment features:
Cavity size φ1200-φ2000mm;
Use anode layer ion source/gridless RF ICP system;
Fully automatic coating process is achieved through ACS fully automatic coating control system;
The workpiece rack is a multi-piece rack type/planetary structure;
The oil-free exhaust system can be customized;
The film forming process and status can be observed from multiple angles;