Presentation of the equipment's characteristics
We have developed, designed and manufactured hot wire CVD diamond equipment, which is divided into two types: experimental equipment and production equipment. The equipment is mainly used for the development and production of micron and nanocrystalline diamond films. It can be used for mechanical level, thermal level, optical level, acoustic level, etc.
We have developed, designed and manufactured hot wire CVD diamond equipment, which is divided into two categories: experimental equipment and production equipment.
The equipment is mainly used for the research and development and production of micron and nanocrystalline diamond films. It can be used for the research and development and production of mechanical, thermal, optical and acoustic diamond products.
It can manufacture large-size diamond polycrystalline wafers for heat sinks of high-power devices, high-frequency devices and high-power lasers.
It can be used to produce corrosion-resistant and wear-resistant hard coatings; diamond products for sewage treatment in the field of environmental protection.
It can be used for the preparation of diamond films on flat workpieces, and can also be used for the preparation of diamond hard coatings on tool surfaces or other irregular surfaces.
It can be used for the research and development and production of solar thin-film batteries.
Workpiece size
The size of the circular plane work: maximum φ600mm.
The width of the rectangular work size is 1000mm/length, which can be determined according to the length of the coating chamber (such as: the workpiece length is 1500mm).
Equipped with a water-cooled sample table.
It can be coated on one side or both sides.
Hot wire power supply power Can reach 300KW, 1KW~300KW adjustable (power range can be configured according to user process requirements) Equipment safety Power system detection and protection Set vacuum detection and alarm protection function Cooling circulating water system pressure detection and flow detection and alarm protection Set water pressure detection and alarm protection device Set water flow detection alarm device Equipment composition Vacuum chamber composition Double-layer water-cooling structure, vertical round, vertical D-shaped, vertical rectangular, horizontal rectangular, front and back doors, vacuum size, determined according to the size and quantity of the workpiece. Hot wire Hot wire material: tantalum wire, or tungsten wire Hot wire temperature: 1800℃~2500℃ adjustable Hot wire does not collapse (solves the problem of hot wire collapse caused by long-term heating). Sample stage Can be water-cooled, biased, rotatable, and liftable. It is controlled by a speed-regulating motor and can realize automatic lifting (the distance between the hot wire and the substrate is adjustable within the range of 5~100mm). It is required to be stable and the up and down fluctuations are not greater than 0.1mm. Working gas circuit (CVD) The working gas circuit is configured according to the user’s process requirements: The following gas configuration is a configuration example of a certain user. H2 (5000sccm, concentration 100%) CH4 (200sccm, concentration 100%) B2H6 (50sccm, H2 concentration 99%) Ar (1000sccm, concentration 100%) Vacuum acquisition and measurement system Control system and software |


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