{"id":2719,"date":"2025-03-18T03:25:09","date_gmt":"2025-03-18T03:25:09","guid":{"rendered":"https:\/\/greenstone-tech.com\/?post_type=machinery-equipment&p=2719"},"modified":"2026-01-18T20:30:23","modified_gmt":"2026-01-18T20:30:23","slug":"gstxcvd-lpcvd-dusuk-basincli-ki%cc%87myasal-buhar-bi%cc%87ri%cc%87kti%cc%87rme-eki%cc%87pmani","status":"publish","type":"machinery-equipment","link":"https:\/\/www.greenstone-tech.com\/tr\/machinery-equipment\/gstxcvd-lpcvd-low-pressure-chemical-vapor-deposition-equipment\/","title":{"rendered":"GSTXCVD LPCVD D\u00fc\u015f\u00fck Bas\u0131n\u00e7l\u0131 Kimyasal Buhar Biriktirme Ekipman\u0131"},"content":{"rendered":"
Tip<\/td>Parametre<\/td><\/tr>
Film T\u00fcrleri<\/td>Si\u2083N\u2084, Poly-Si, SiO\u2082, etc.<\/td><\/tr>
Maksimum S\u0131cakl\u0131k<\/td>1200\u00b0C<\/td><\/tr>
Sabit S\u0131cakl\u0131k B\u00f6lgesi Uzunlu\u011fu<\/td>Kullan\u0131c\u0131 gereksinimlerine g\u00f6re yap\u0131land\u0131r\u0131lm\u0131\u015f<\/td><\/tr>
Sabit B\u00f6lgede S\u0131cakl\u0131k Kontrol Do\u011frulu\u011fu<\/td>\u2264\u00b10.5\u00b0C<\/td><\/tr>
\u00c7al\u0131\u015fma Bas\u0131n\u00e7 Aral\u0131\u011f\u0131<\/td>13\uff5e1330Pa<\/td><\/tr>
Film D\u00fczensizli\u011fi<\/td>\u2264\u00b15%<\/td><\/tr>
Substrat Y\u00fckleme Kapasitesi<\/td>Standard substrates: 1\uff5e3 pieces; multiple irregular-sized wafers<\/td><\/tr>
Bas\u0131n\u00e7 Kontrol\u00fc<\/td>Kapal\u0131 d\u00f6ng\u00fc gaz dolum kontrol\u00fc<\/td><\/tr>
Y\u00fckleme Y\u00f6ntemi<\/td>Manuel numune y\u00fckleme\/bo\u015faltma<\/td><\/tr><\/tbody><\/table>
LPCVD d\u00fc\u015f\u00fck bas\u0131n\u00e7l\u0131 kimyasal buhar biriktirme ekipman\u0131 (bilimsel ara\u015ft\u0131rma LPCVD) ekipman\u0131n\u0131n ana teknik g\u00f6stergeleri<\/figcaption><\/figure>\n\n\n\n
Tip<\/td>Parametre<\/td><\/tr>
Film T\u00fcrleri<\/td>Si\u2083N\u2084, Poly-Si, SiO\u2082, etc.<\/td><\/tr>
Maksimum S\u0131cakl\u0131k<\/td>1200\u00b0C<\/td><\/tr>
Sabit S\u0131cakl\u0131k B\u00f6lgesi Uzunlu\u011fu<\/td>Kullan\u0131c\u0131 gereksinimlerine g\u00f6re yap\u0131land\u0131r\u0131lm\u0131\u015f<\/td><\/tr>
Sabit B\u00f6lgede S\u0131cakl\u0131k Kontrol Do\u011frulu\u011fu<\/td>\u2264\u00b10.5\u00b0C<\/td><\/tr>
\u00c7al\u0131\u015fma Bas\u0131n\u00e7 Aral\u0131\u011f\u0131<\/td>13\uff5e1330Pa<\/td><\/tr>
Film D\u00fczensizli\u011fi<\/td>\u2264\u00b15%<\/td><\/tr>
Parti Ba\u015f\u0131na Substrat Y\u00fckleme Kapasitesi<\/td>100 gofret<\/td><\/tr>
Toplam G\u00fc\u00e7<\/td>16kW<\/td><\/tr>
So\u011futma Suyu T\u00fcketimi<\/td>2m\u00b3\/h<\/td><\/tr>
Bas\u0131n\u00e7 Kontrol\u00fc<\/td>Kapal\u0131 d\u00f6ng\u00fc gaz dolum kontrol\u00fc<\/td><\/tr>
Y\u00fckleme Y\u00f6ntemi<\/td>Otomatik tekne y\u00fckleme<\/td><\/tr><\/tbody><\/table>
LPCVD d\u00fc\u015f\u00fck bas\u0131n\u00e7l\u0131 kimyasal buhar biriktirme ekipman\u0131 (\u00fcretim tipi LPCVD) ekipman ana teknik g\u00f6stergeleri<\/figcaption><\/figure>\n\n\n\n
\n
\"\"
LPCVD manuel \u00e7al\u0131\u015fma aray\u00fcz\u00fc<\/figcaption><\/figure>\n\n\n\n
\"\"
LPCVD ger\u00e7ek zamanl\u0131 \u00e7al\u0131\u015fma izleme aray\u00fcz\u00fc<\/figcaption><\/figure>\n\n\n\n
\"\"
LPCVD otomatik \u00e7al\u0131\u015fma aray\u00fcz\u00fc<\/figcaption><\/figure>\n\n\n\n
\"\"
LPCVD s\u00fcre\u00e7 d\u00fczenleme aray\u00fcz\u00fc<\/figcaption><\/figure>\n<\/figure>","protected":false},"featured_media":2711,"template":"","meta":{"_acf_changed":false,"footnotes":""},"categories":[67,139],"tags":[],"class_list":["post-2719","machinery-equipment","type-machinery-equipment","status-publish","has-post-thumbnail","hentry","category-chemical-vapor-deposition-cvd-equipment","category-associated-equipment"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.greenstone-tech.com\/tr\/wp-json\/wp\/v2\/machinery-equipment\/2719","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.greenstone-tech.com\/tr\/wp-json\/wp\/v2\/machinery-equipment"}],"about":[{"href":"https:\/\/www.greenstone-tech.com\/tr\/wp-json\/wp\/v2\/types\/machinery-equipment"}],"version-history":[{"count":1,"href":"https:\/\/www.greenstone-tech.com\/tr\/wp-json\/wp\/v2\/machinery-equipment\/2719\/revisions"}],"predecessor-version":[{"id":6219,"href":"https:\/\/www.greenstone-tech.com\/tr\/wp-json\/wp\/v2\/machinery-equipment\/2719\/revisions\/6219"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.greenstone-tech.com\/tr\/wp-json\/wp\/v2\/media\/2711"}],"wp:attachment":[{"href":"https:\/\/www.greenstone-tech.com\/tr\/wp-json\/wp\/v2\/media?parent=2719"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.greenstone-tech.com\/tr\/wp-json\/wp\/v2\/categories?post=2719"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.greenstone-tech.com\/tr\/wp-json\/wp\/v2\/tags?post=2719"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}