{"id":2719,"date":"2025-03-18T03:25:09","date_gmt":"2025-03-18T03:25:09","guid":{"rendered":"https:\/\/greenstone-tech.com\/?post_type=machinery-equipment&p=2719"},"modified":"2026-01-18T20:30:23","modified_gmt":"2026-01-18T20:30:23","slug":"gstxcvd-lpcvd-low-pressure-chemical-vapor-deposition-equipment","status":"publish","type":"machinery-equipment","link":"https:\/\/www.greenstone-tech.com\/pt\/machinery-equipment\/gstxcvd-lpcvd-low-pressure-chemical-vapor-deposition-equipment\/","title":{"rendered":"Equipamento de deposi\u00e7\u00e3o qu\u00edmica de vapor de baixa press\u00e3o GSTXCVD LPCVD"},"content":{"rendered":"
Tipo<\/td>Par\u00e2metro<\/td><\/tr>
Film Types<\/td>Si\u2083N\u2084, Poly-Si, SiO\u2082, etc.<\/td><\/tr>
Maximum Temperature<\/td>1200\u00b0C<\/td><\/tr>
Constant Temperature Zone Length<\/td>Configured according to user requirements<\/td><\/tr>
Temperature Control Accuracy in Constant Zone<\/td>\u2264\u00b10.5\u00b0C<\/td><\/tr>
Working Pressure Range<\/td>13\uff5e1330Pa<\/td><\/tr>
Film Non-Uniformity<\/td>\u2264\u00b15%<\/td><\/tr>
Substrate Loading Capacity<\/td>Standard substrates: 1\uff5e3 pieces; multiple irregular-sized wafers<\/td><\/tr>
Pressure Control<\/td>Closed-loop gas filling control<\/td><\/tr>
Loading Method<\/td>Manual sample loading\/unloading<\/td><\/tr><\/tbody><\/table>
Main technical indicators of LPCVD low pressure chemical vapor deposition equipment (scientific research LPCVD) equipment<\/figcaption><\/figure>\n\n\n\n
Tipo<\/td>Par\u00e2metro<\/td><\/tr>
Film Types<\/td>Si\u2083N\u2084, Poly-Si, SiO\u2082, etc.<\/td><\/tr>
Maximum Temperature<\/td>1200\u00b0C<\/td><\/tr>
Constant Temperature Zone Length<\/td>Configured according to user requirements<\/td><\/tr>
Temperature Control Accuracy in Constant Zone<\/td>\u2264\u00b10.5\u00b0C<\/td><\/tr>
Working Pressure Range<\/td>13\uff5e1330Pa<\/td><\/tr>
Film Non-Uniformity<\/td>\u2264\u00b15%<\/td><\/tr>
Substrate Loading Capacity per Batch<\/td>100 wafers<\/td><\/tr>
Total Power<\/td>16kW<\/td><\/tr>
Cooling Water Consumption<\/td>2m\u00b3\/h<\/td><\/tr>
Pressure Control<\/td>Closed-loop gas filling control<\/td><\/tr>
Loading Method<\/td>Automatic boat loading<\/td><\/tr><\/tbody><\/table>
LPCVD low pressure chemical vapor deposition equipment (production type LPCVD) equipment main technical indicators<\/figcaption><\/figure>\n\n\n\n
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LPCVD manual operation interface<\/figcaption><\/figure>\n\n\n\n
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LPCVD real-time operation monitoring interface<\/figcaption><\/figure>\n\n\n\n
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LPCVD automatic operation interface<\/figcaption><\/figure>\n\n\n\n
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LPCVD process editing interface<\/figcaption><\/figure>\n<\/figure>","protected":false},"featured_media":2711,"template":"","meta":{"_acf_changed":false,"footnotes":""},"categories":[67,139],"tags":[],"class_list":["post-2719","machinery-equipment","type-machinery-equipment","status-publish","has-post-thumbnail","hentry","category-chemical-vapor-deposition-cvd-equipment","category-associated-equipment"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.greenstone-tech.com\/pt\/wp-json\/wp\/v2\/machinery-equipment\/2719","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.greenstone-tech.com\/pt\/wp-json\/wp\/v2\/machinery-equipment"}],"about":[{"href":"https:\/\/www.greenstone-tech.com\/pt\/wp-json\/wp\/v2\/types\/machinery-equipment"}],"version-history":[{"count":1,"href":"https:\/\/www.greenstone-tech.com\/pt\/wp-json\/wp\/v2\/machinery-equipment\/2719\/revisions"}],"predecessor-version":[{"id":6219,"href":"https:\/\/www.greenstone-tech.com\/pt\/wp-json\/wp\/v2\/machinery-equipment\/2719\/revisions\/6219"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.greenstone-tech.com\/pt\/wp-json\/wp\/v2\/media\/2711"}],"wp:attachment":[{"href":"https:\/\/www.greenstone-tech.com\/pt\/wp-json\/wp\/v2\/media?parent=2719"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.greenstone-tech.com\/pt\/wp-json\/wp\/v2\/categories?post=2719"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.greenstone-tech.com\/pt\/wp-json\/wp\/v2\/tags?post=2719"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}