{"id":2719,"date":"2025-03-18T03:25:09","date_gmt":"2025-03-18T03:25:09","guid":{"rendered":"https:\/\/greenstone-tech.com\/?post_type=machinery-equipment&p=2719"},"modified":"2026-01-18T20:30:23","modified_gmt":"2026-01-18T20:30:23","slug":"gstxcvd-lpcvd-sprzet-do-niskocisnieniowego-chemicznego-osadzania-z-fazy-gazowej","status":"publish","type":"machinery-equipment","link":"https:\/\/www.greenstone-tech.com\/pl\/machinery-equipment\/gstxcvd-lpcvd-low-pressure-chemical-vapor-deposition-equipment\/","title":{"rendered":"GSTXCVD LPCVD Sprz\u0119t do osadzania chemicznego z fazy gazowej pod niskim ci\u015bnieniem"},"content":{"rendered":"
Typ<\/td>Parametr<\/td><\/tr>
Rodzaje film\u00f3w<\/td>Si\u2083N\u2084, Poly-Si, SiO\u2082, etc.<\/td><\/tr>
Maksymalna temperatura<\/td>1200\u00b0C<\/td><\/tr>
D\u0142ugo\u015b\u0107 strefy sta\u0142ej temperatury<\/td>Konfiguracja zgodnie z wymaganiami u\u017cytkownika<\/td><\/tr>
Dok\u0142adno\u015b\u0107 kontroli temperatury w strefie sta\u0142ej<\/td>\u2264\u00b10.5\u00b0C<\/td><\/tr>
Zakres ci\u015bnienia roboczego<\/td>13\uff5e1330Pa<\/td><\/tr>
Nier\u00f3wnomierno\u015b\u0107 filmu<\/td>\u2264\u00b15%<\/td><\/tr>
Zdolno\u015b\u0107 \u0142adowania pod\u0142o\u017ca<\/td>Standard substrates: 1\uff5e3 pieces; multiple irregular-sized wafers<\/td><\/tr>
Kontrola ci\u015bnienia<\/td>Kontrola nape\u0142niania gazem w p\u0119tli zamkni\u0119tej<\/td><\/tr>
Metoda \u0142adowania<\/td>R\u0119czne \u0142adowanie\/roz\u0142adowywanie pr\u00f3bek<\/td><\/tr><\/tbody><\/table>
G\u0142\u00f3wne wska\u017aniki techniczne urz\u0105dze\u0144 do niskoci\u015bnieniowego chemicznego osadzania z fazy gazowej LPCVD (badania naukowe LPCVD)<\/figcaption><\/figure>\n\n\n\n
Typ<\/td>Parametr<\/td><\/tr>
Rodzaje film\u00f3w<\/td>Si\u2083N\u2084, Poly-Si, SiO\u2082, etc.<\/td><\/tr>
Maksymalna temperatura<\/td>1200\u00b0C<\/td><\/tr>
D\u0142ugo\u015b\u0107 strefy sta\u0142ej temperatury<\/td>Konfiguracja zgodnie z wymaganiami u\u017cytkownika<\/td><\/tr>
Dok\u0142adno\u015b\u0107 kontroli temperatury w strefie sta\u0142ej<\/td>\u2264\u00b10.5\u00b0C<\/td><\/tr>
Zakres ci\u015bnienia roboczego<\/td>13\uff5e1330Pa<\/td><\/tr>
Nier\u00f3wnomierno\u015b\u0107 filmu<\/td>\u2264\u00b15%<\/td><\/tr>
Wydajno\u015b\u0107 \u0142adowania pod\u0142o\u017ca na parti\u0119<\/td>100 wafli<\/td><\/tr>
Ca\u0142kowita moc<\/td>16kW<\/td><\/tr>
Zu\u017cycie wody ch\u0142odz\u0105cej<\/td>2m\u00b3\/h<\/td><\/tr>
Kontrola ci\u015bnienia<\/td>Kontrola nape\u0142niania gazem w p\u0119tli zamkni\u0119tej<\/td><\/tr>
Metoda \u0142adowania<\/td>Automatyczny za\u0142adunek \u0142odzi<\/td><\/tr><\/tbody><\/table>
Sprz\u0119t do niskoci\u015bnieniowego chemicznego osadzania z fazy gazowej LPCVD (typ produkcyjny LPCVD) g\u0142\u00f3wne wska\u017aniki techniczne sprz\u0119tu<\/figcaption><\/figure>\n\n\n\n
\n
\"\"
Interfejs obs\u0142ugi r\u0119cznej LPCVD<\/figcaption><\/figure>\n\n\n\n
\"\"
Interfejs monitorowania pracy LPCVD w czasie rzeczywistym<\/figcaption><\/figure>\n\n\n\n
\"\"
Interfejs automatycznej obs\u0142ugi LPCVD<\/figcaption><\/figure>\n\n\n\n
\"\"
Interfejs edycji procesu LPCVD<\/figcaption><\/figure>\n<\/figure>","protected":false},"featured_media":2711,"template":"","meta":{"_acf_changed":false,"footnotes":""},"categories":[67,139],"tags":[],"class_list":["post-2719","machinery-equipment","type-machinery-equipment","status-publish","has-post-thumbnail","hentry","category-chemical-vapor-deposition-cvd-equipment","category-associated-equipment"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.greenstone-tech.com\/pl\/wp-json\/wp\/v2\/machinery-equipment\/2719","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.greenstone-tech.com\/pl\/wp-json\/wp\/v2\/machinery-equipment"}],"about":[{"href":"https:\/\/www.greenstone-tech.com\/pl\/wp-json\/wp\/v2\/types\/machinery-equipment"}],"version-history":[{"count":1,"href":"https:\/\/www.greenstone-tech.com\/pl\/wp-json\/wp\/v2\/machinery-equipment\/2719\/revisions"}],"predecessor-version":[{"id":6219,"href":"https:\/\/www.greenstone-tech.com\/pl\/wp-json\/wp\/v2\/machinery-equipment\/2719\/revisions\/6219"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.greenstone-tech.com\/pl\/wp-json\/wp\/v2\/media\/2711"}],"wp:attachment":[{"href":"https:\/\/www.greenstone-tech.com\/pl\/wp-json\/wp\/v2\/media?parent=2719"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.greenstone-tech.com\/pl\/wp-json\/wp\/v2\/categories?post=2719"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.greenstone-tech.com\/pl\/wp-json\/wp\/v2\/tags?post=2719"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}