GST-CVD1200 induction heating CVD chemical vapor deposition furnace equipment

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Presentation of the equipment's characteristics

The CVD Chemical Vapor Deposition Furnace is a critical piece of equipment for the production of C/C composite materials, widely used in the aerospace, defense, and high-end manufacturing industries. This device utilizes mid-frequency induction heating and features a vertical furnace design with a lift mechanism at the bottom for efficient loading and unloading. The temperature control system employs an intelligent, program-controlled temperature controller from Japan’s renowned brands such as Shida Denki (or equivalent top-tier brands), ensuring precise temperature regulation and process stability. The complete system comprises the furnace body, mid-frequency power supply, electronic control system, gas control system, and water cooling system, integrating advanced technology and smart control to provide robust support for the high-quality production of C/C composites.

processed samples

The CVD Chemical Vapor Deposition Furnace is designed with advanced mid-frequency induction heating technology and a vertical furnace structure, ensuring high heating efficiency and uniform temperature distribution. Its advantages include:

  • Precise Temperature Control and Stability: Equipped with an intelligent, program-controlled temperature system from renowned brands such as Shida Denki or equivalent, it delivers rapid response and accurate temperature regulation, ensuring high reproducibility and process stability during deposition.
  • High Automation and Operational Efficiency: The bottom lifting design for loading and unloading materials minimizes manual intervention, thereby boosting overall production efficiency.
  • Comprehensive System Integration: The complete setup includes the furnace body, mid-frequency power supply, electronic control system, gas control system, and water cooling system, all working in unison to provide reliable support for complex deposition processes.
  • Energy Efficiency and Environmental Benefits: Advanced process design and intelligent control optimize energy consumption, thereby reducing production costs.

In the aerospace sector, this device plays a pivotal role in the fabrication of thermal barrier coatings (TBC). TBC is a high-performance ceramic coating primarily used to protect components such as turbine blades in aircraft engines from extreme temperatures. With its precise temperature control and uniform deposition capabilities, the furnace ensures that the coating is dense and strongly adherent, thereby enhancing the lifespan and reliability of TBCs and meeting the stringent demands for high-temperature endurance and safe operation in aerospace engines.

No.ParameterSpecification
1Furnace StructureVertical cylindrical design with bottom lift-out mechanism
2Heating MethodMid-frequency induction heating
3Operating Temperature2200℃
4Common Temperature Range850~1150℃
5Temperature Uniformity900±25℃, 1100±12.5℃
6Temperature ControlIntelligent temperature controller (Shida Denki FP23 or equivalent), offering automatic program control and manual power adjustment modes
7Working Chamber Dimensionsφ1200×H2500mm (diameter × height)
8Loading Capacity<2T
9Heating Ramp Time6~8h (from room temperature to 1200℃)
10Heating Power300kw
11Temperature Control Accuracy±2℃ during ramp-up, ±1℃ during soak
12Vacuum Level≤50Pa (with 4 sets of H150 sliding valve pumps)
13Pumping Time<50min (to reach 50Pa in cold empty furnace)
14Cold Furnace Compression Rate≤66.7Pa/h
15Compatible GasesNitrogen, hydrocarbon gases containing carbon
16Gas Inlet PositionCenter of the top
17Gas Flow Rate300L/min
18Continuous Operation Time300h
19Cooling Water ParametersFlow: 30m³/h; Pressure: 0.15–0.25MPa
20Equipment Footprint6000×6000×6000mm (L×W×H)
CustomizationGST-CVD1200 Induction Heated CVD Furnace accepts non-standard customization