{"id":2734,"date":"2025-03-18T04:57:00","date_gmt":"2025-03-18T04:57:00","guid":{"rendered":"https:\/\/greenstone-tech.com\/?post_type=machinery-equipment&p=2734"},"modified":"2026-01-18T20:30:23","modified_gmt":"2026-01-18T20:30:23","slug":"equipement-de-depot-chimique-en-phase-vapeur-organometallique-gstexcvd-mocvd","status":"publish","type":"machinery-equipment","link":"https:\/\/www.greenstone-tech.com\/fr\/machinery-equipment\/gstxcvd-mocvd-metal-organic-chemical-vapor-deposition-equipment\/","title":{"rendered":"\u00c9quipement de d\u00e9p\u00f4t chimique en phase vapeur organom\u00e9tallique GSTXCVD MOCVD"},"content":{"rendered":"
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L'\u00e9quipement MOCVD (d\u00e9p\u00f4t chimique en phase vapeur organom\u00e9tallique) permet la croissance \u00e9pitaxiale de GaN, ZnO, etc. Le transport des mat\u00e9riaux s'effectue par un syst\u00e8me de gaz ultra-pur, et l'alimentation et la commutation de la source sont assur\u00e9es par une technologie d'admission \u00e0 vannes combin\u00e9es multivoies. Gr\u00e2ce \u00e0 l'espace mort tr\u00e8s r\u00e9duit de ces vannes, la quantit\u00e9 r\u00e9siduelle de source est minime, ce qui favorise la croissance de mat\u00e9riaux \u00e0 interfaces abruptes.<\/figcaption><\/figure>\n\n\n\n
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La technologie de contr\u00f4le de la diff\u00e9rence de pression est utilis\u00e9e pour contr\u00f4ler la pression entre la ligne de d\u00e9rivation et la ligne principale de la vanne combin\u00e9e, ce qui r\u00e9duit consid\u00e9rablement les fluctuations de pression et de concentration de la source, ce qui est b\u00e9n\u00e9fique \u00e0 la r\u00e9p\u00e9tabilit\u00e9 et \u00e0 la stabilit\u00e9 de la croissance du mat\u00e9riau.<\/figcaption><\/figure>\n\n\n\n
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Une buse d'entr\u00e9e d'air int\u00e9gr\u00e9e \u00e0 la canalisation permet aux r\u00e9actifs de se m\u00e9langer et de r\u00e9agir uniform\u00e9ment sur la surface du substrat, r\u00e9duisant ainsi consid\u00e9rablement le risque de pr\u00e9-r\u00e9action.<\/figcaption><\/figure>\n\n\n\n
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On utilise un four de chauffage \u00e0 r\u00e9sistance \u00e0 mont\u00e9e et descente de temp\u00e9rature rapides.<\/figcaption><\/figure>\n<\/figure>","protected":false},"featured_media":2729,"template":"","meta":{"_acf_changed":false,"footnotes":""},"categories":[67,139],"tags":[],"class_list":["post-2734","machinery-equipment","type-machinery-equipment","status-publish","has-post-thumbnail","hentry","category-chemical-vapor-deposition-cvd-equipment","category-associated-equipment"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.greenstone-tech.com\/fr\/wp-json\/wp\/v2\/machinery-equipment\/2734","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.greenstone-tech.com\/fr\/wp-json\/wp\/v2\/machinery-equipment"}],"about":[{"href":"https:\/\/www.greenstone-tech.com\/fr\/wp-json\/wp\/v2\/types\/machinery-equipment"}],"version-history":[{"count":2,"href":"https:\/\/www.greenstone-tech.com\/fr\/wp-json\/wp\/v2\/machinery-equipment\/2734\/revisions"}],"predecessor-version":[{"id":6217,"href":"https:\/\/www.greenstone-tech.com\/fr\/wp-json\/wp\/v2\/machinery-equipment\/2734\/revisions\/6217"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.greenstone-tech.com\/fr\/wp-json\/wp\/v2\/media\/2729"}],"wp:attachment":[{"href":"https:\/\/www.greenstone-tech.com\/fr\/wp-json\/wp\/v2\/media?parent=2734"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.greenstone-tech.com\/fr\/wp-json\/wp\/v2\/categories?post=2734"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.greenstone-tech.com\/fr\/wp-json\/wp\/v2\/tags?post=2734"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}