{"id":2719,"date":"2025-03-18T03:25:09","date_gmt":"2025-03-18T03:25:09","guid":{"rendered":"https:\/\/greenstone-tech.com\/?post_type=machinery-equipment&p=2719"},"modified":"2026-01-18T20:30:23","modified_gmt":"2026-01-18T20:30:23","slug":"equipement-de-depot-chimique-en-phase-vapeur-a-basse-pression-gstxcvd-lpcvd","status":"publish","type":"machinery-equipment","link":"https:\/\/www.greenstone-tech.com\/fr\/machinery-equipment\/gstxcvd-lpcvd-low-pressure-chemical-vapor-deposition-equipment\/","title":{"rendered":"\u00c9quipement de d\u00e9p\u00f4t chimique en phase vapeur basse pression GSTXCVD LPCVD"},"content":{"rendered":"
Type<\/td>Param\u00e8tre<\/td><\/tr>
Types de films<\/td>Si\u2083N\u2084, Poly-Si, SiO\u2082, etc.<\/td><\/tr>
Temp\u00e9rature maximale<\/td>1200\u00b0C<\/td><\/tr>
Longueur de la zone \u00e0 temp\u00e9rature constante<\/td>Configur\u00e9 selon les besoins de l'utilisateur<\/td><\/tr>
Pr\u00e9cision du contr\u00f4le de la temp\u00e9rature en zone constante<\/td>\u2264\u00b10.5\u00b0C<\/td><\/tr>
Plage de pression de travail<\/td>13\uff5e1330Pa<\/td><\/tr>
Non-uniformit\u00e9 du film<\/td>\u2264\u00b15%<\/td><\/tr>
Capacit\u00e9 de chargement du substrat<\/td>Standard substrates: 1\uff5e3 pieces; multiple irregular-sized wafers<\/td><\/tr>
Contr\u00f4le de la pression<\/td>Contr\u00f4le du remplissage de gaz en boucle ferm\u00e9e<\/td><\/tr>
M\u00e9thode de chargement<\/td>Chargement\/d\u00e9chargement manuel des \u00e9chantillons<\/td><\/tr><\/tbody><\/table>
Principaux indicateurs techniques de l'\u00e9quipement de d\u00e9p\u00f4t chimique en phase vapeur \u00e0 basse pression LPCVD (recherche scientifique LPCVD)<\/figcaption><\/figure>\n\n\n\n
Type<\/td>Param\u00e8tre<\/td><\/tr>
Types de films<\/td>Si\u2083N\u2084, Poly-Si, SiO\u2082, etc.<\/td><\/tr>
Temp\u00e9rature maximale<\/td>1200\u00b0C<\/td><\/tr>
Longueur de la zone \u00e0 temp\u00e9rature constante<\/td>Configur\u00e9 selon les besoins de l'utilisateur<\/td><\/tr>
Pr\u00e9cision du contr\u00f4le de la temp\u00e9rature en zone constante<\/td>\u2264\u00b10.5\u00b0C<\/td><\/tr>
Plage de pression de travail<\/td>13\uff5e1330Pa<\/td><\/tr>
Non-uniformit\u00e9 du film<\/td>\u2264\u00b15%<\/td><\/tr>
Capacit\u00e9 de chargement de substrat par lot<\/td>100 gaufrettes<\/td><\/tr>
Puissance totale<\/td>16kW<\/td><\/tr>
Consommation d'eau de refroidissement<\/td>2m\u00b3\/h<\/td><\/tr>
Contr\u00f4le de la pression<\/td>Contr\u00f4le du remplissage de gaz en boucle ferm\u00e9e<\/td><\/tr>
M\u00e9thode de chargement<\/td>Chargement automatique des bateaux<\/td><\/tr><\/tbody><\/table>
Principaux indicateurs techniques de l'\u00e9quipement de d\u00e9p\u00f4t chimique en phase vapeur \u00e0 basse pression LPCVD (type de production LPCVD)<\/figcaption><\/figure>\n\n\n\n
\n
\"\"
Interface d'op\u00e9ration manuelle LPCVD<\/figcaption><\/figure>\n\n\n\n
\"\"
Interface de surveillance du fonctionnement en temps r\u00e9el du LPCVD<\/figcaption><\/figure>\n\n\n\n
\"\"
Interface de fonctionnement automatique LPCVD<\/figcaption><\/figure>\n\n\n\n
\"\"
Interface d'\u00e9dition du processus LPCVD<\/figcaption><\/figure>\n<\/figure>","protected":false},"featured_media":2711,"template":"","meta":{"_acf_changed":false,"footnotes":""},"categories":[67,139],"tags":[],"class_list":["post-2719","machinery-equipment","type-machinery-equipment","status-publish","has-post-thumbnail","hentry","category-chemical-vapor-deposition-cvd-equipment","category-associated-equipment"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.greenstone-tech.com\/fr\/wp-json\/wp\/v2\/machinery-equipment\/2719","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.greenstone-tech.com\/fr\/wp-json\/wp\/v2\/machinery-equipment"}],"about":[{"href":"https:\/\/www.greenstone-tech.com\/fr\/wp-json\/wp\/v2\/types\/machinery-equipment"}],"version-history":[{"count":1,"href":"https:\/\/www.greenstone-tech.com\/fr\/wp-json\/wp\/v2\/machinery-equipment\/2719\/revisions"}],"predecessor-version":[{"id":6219,"href":"https:\/\/www.greenstone-tech.com\/fr\/wp-json\/wp\/v2\/machinery-equipment\/2719\/revisions\/6219"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.greenstone-tech.com\/fr\/wp-json\/wp\/v2\/media\/2711"}],"wp:attachment":[{"href":"https:\/\/www.greenstone-tech.com\/fr\/wp-json\/wp\/v2\/media?parent=2719"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.greenstone-tech.com\/fr\/wp-json\/wp\/v2\/categories?post=2719"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.greenstone-tech.com\/fr\/wp-json\/wp\/v2\/tags?post=2719"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}