{"id":2719,"date":"2025-03-18T03:25:09","date_gmt":"2025-03-18T03:25:09","guid":{"rendered":"https:\/\/greenstone-tech.com\/?post_type=machinery-equipment&p=2719"},"modified":"2026-01-18T20:30:23","modified_gmt":"2026-01-18T20:30:23","slug":"gstxcvd-lpcvd-zarizeni-pro-nizkotlake-chemicke-naparovani","status":"publish","type":"machinery-equipment","link":"https:\/\/www.greenstone-tech.com\/cs\/machinery-equipment\/gstxcvd-lpcvd-low-pressure-chemical-vapor-deposition-equipment\/","title":{"rendered":"Za\u0159\u00edzen\u00ed pro n\u00edzkotlak\u00e9 chemick\u00e9 napa\u0159ov\u00e1n\u00ed GSTXCVD LPCVD"},"content":{"rendered":"
Typ<\/td>Parametr<\/td><\/tr>
Typy film\u016f<\/td>Si\u2083N\u2084, Poly-Si, SiO\u2082, etc.<\/td><\/tr>
Maxim\u00e1ln\u00ed teplota<\/td>1200\u00b0C<\/td><\/tr>
D\u00e9lka konstantn\u00ed teplotn\u00ed z\u00f3ny<\/td>Konfigurace podle po\u017eadavk\u016f u\u017eivatele<\/td><\/tr>
P\u0159esnost regulace teploty v konstantn\u00ed z\u00f3n\u011b<\/td>\u2264\u00b10.5\u00b0C<\/td><\/tr>
Rozsah pracovn\u00edho tlaku<\/td>13\uff5e1330Pa<\/td><\/tr>
Nerovnom\u011brnost filmu<\/td>\u2264\u00b15%<\/td><\/tr>
Nosnost substr\u00e1tu<\/td>Standard substrates: 1\uff5e3 pieces; multiple irregular-sized wafers<\/td><\/tr>
\u0158\u00edzen\u00ed tlaku<\/td>Uzav\u0159en\u00e1 smy\u010dka \u0159\u00edzen\u00ed pln\u011bn\u00ed plynem<\/td><\/tr>
Zp\u016fsob nakl\u00e1d\u00e1n\u00ed<\/td>Ru\u010dn\u00ed nakl\u00e1d\u00e1n\u00ed\/vykl\u00e1d\u00e1n\u00ed vzork\u016f<\/td><\/tr><\/tbody><\/table>
Hlavn\u00ed technick\u00e9 ukazatele za\u0159\u00edzen\u00ed pro n\u00edzkotlak\u00e9 chemick\u00e9 napa\u0159ov\u00e1n\u00ed LPCVD (v\u011bdeck\u00fd v\u00fdzkum LPCVD)<\/figcaption><\/figure>\n\n\n\n
Typ<\/td>Parametr<\/td><\/tr>
Typy film\u016f<\/td>Si\u2083N\u2084, Poly-Si, SiO\u2082, etc.<\/td><\/tr>
Maxim\u00e1ln\u00ed teplota<\/td>1200\u00b0C<\/td><\/tr>
D\u00e9lka konstantn\u00ed teplotn\u00ed z\u00f3ny<\/td>Konfigurace podle po\u017eadavk\u016f u\u017eivatele<\/td><\/tr>
P\u0159esnost regulace teploty v konstantn\u00ed z\u00f3n\u011b<\/td>\u2264\u00b10.5\u00b0C<\/td><\/tr>
Rozsah pracovn\u00edho tlaku<\/td>13\uff5e1330Pa<\/td><\/tr>
Nerovnom\u011brnost filmu<\/td>\u2264\u00b15%<\/td><\/tr>
Kapacita nakl\u00e1d\u00e1n\u00ed substr\u00e1tu na d\u00e1vku<\/td>100 oplatek<\/td><\/tr>
Celkov\u00fd v\u00fdkon<\/td>16 kW<\/td><\/tr>
Spot\u0159eba chladic\u00ed vody<\/td>2m\u00b3\/h<\/td><\/tr>
\u0158\u00edzen\u00ed tlaku<\/td>Uzav\u0159en\u00e1 smy\u010dka \u0159\u00edzen\u00ed pln\u011bn\u00ed plynem<\/td><\/tr>
Zp\u016fsob nakl\u00e1d\u00e1n\u00ed<\/td>Automatick\u00e9 nakl\u00e1d\u00e1n\u00ed lod\u00ed<\/td><\/tr><\/tbody><\/table>
Hlavn\u00ed technick\u00e9 ukazatele za\u0159\u00edzen\u00ed pro n\u00edzkotlak\u00e9 chemick\u00e9 napa\u0159ov\u00e1n\u00ed LPCVD (v\u00fdrobn\u00ed typ LPCVD)<\/figcaption><\/figure>\n\n\n\n
\n
\"\"
Rozhran\u00ed pro ru\u010dn\u00ed ovl\u00e1d\u00e1n\u00ed LPCVD<\/figcaption><\/figure>\n\n\n\n
\"\"
Rozhran\u00ed pro sledov\u00e1n\u00ed provozu LPCVD v re\u00e1ln\u00e9m \u010dase<\/figcaption><\/figure>\n\n\n\n
\"\"
Rozhran\u00ed pro automatick\u00fd provoz LPCVD<\/figcaption><\/figure>\n\n\n\n
\"\"
Rozhran\u00ed pro \u00fapravu procesu LPCVD<\/figcaption><\/figure>\n<\/figure>","protected":false},"featured_media":2711,"template":"","meta":{"_acf_changed":false,"footnotes":""},"categories":[67,139],"tags":[],"class_list":["post-2719","machinery-equipment","type-machinery-equipment","status-publish","has-post-thumbnail","hentry","category-chemical-vapor-deposition-cvd-equipment","category-associated-equipment"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.greenstone-tech.com\/cs\/wp-json\/wp\/v2\/machinery-equipment\/2719","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.greenstone-tech.com\/cs\/wp-json\/wp\/v2\/machinery-equipment"}],"about":[{"href":"https:\/\/www.greenstone-tech.com\/cs\/wp-json\/wp\/v2\/types\/machinery-equipment"}],"version-history":[{"count":1,"href":"https:\/\/www.greenstone-tech.com\/cs\/wp-json\/wp\/v2\/machinery-equipment\/2719\/revisions"}],"predecessor-version":[{"id":6219,"href":"https:\/\/www.greenstone-tech.com\/cs\/wp-json\/wp\/v2\/machinery-equipment\/2719\/revisions\/6219"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.greenstone-tech.com\/cs\/wp-json\/wp\/v2\/media\/2711"}],"wp:attachment":[{"href":"https:\/\/www.greenstone-tech.com\/cs\/wp-json\/wp\/v2\/media?parent=2719"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.greenstone-tech.com\/cs\/wp-json\/wp\/v2\/categories?post=2719"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.greenstone-tech.com\/cs\/wp-json\/wp\/v2\/tags?post=2719"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}